Suppression of spurious vibration of cantilever in atomic force microscopy by enhancement of bending rigidity of cantilever chip substrate

Review of Scientific Instruments

Volumn 78, Issue 10, 2007, Pages

  Tsuji, Toshihiro ^a   Kobari, Kentaro ^a   Ide, Seishiro ^a   Yamanaka, Kazushi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DELAMINATION; ELECTRODES; RESONANCE; SPURIOUS SIGNAL NOISE; SUBSTRATES;

BENDING VIBRATION; CANTILEVER CHIP; COVER PRESSING; SPURIOUS RESPONSE (SR);

VIBRATIONAL SPECTRA;

ARTICLE; ARTIFACT; ATOMIC FORCE MICROSCOPY; ELASTICITY; EQUIPMENT; EQUIPMENT DESIGN; IMAGE ENHANCEMENT; INSTRUMENTATION; LABORATORY DIAGNOSIS; MECHANICAL STRESS; METHODOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER; VIBRATION;

ARTIFACTS; ELASTICITY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; IMAGE ENHANCEMENT; MICROSCOPY, ATOMIC FORCE; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SPECIMEN HANDLING; STRESS, MECHANICAL; TRANSDUCERS; VIBRATION;

EID: 36048971434     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2793498     Document Type: Article

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