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Volumn 75, Issue 9, 2004, Pages 2903-2905
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Reduction of spurious resonance peaks in microcantilever tuning through substrate contact surface reduction
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Author keywords
[No Author keywords available]
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Indexed keywords
MICROCANTILEVER;
SPURIOUS PEAKS;
SURFACE AREA;
SURFACE REDUCTION;
ATOMIC FORCE MICROSCOPY;
DAMPING;
MICROACTUATORS;
NATURAL FREQUENCIES;
OSCILLATIONS;
RESONANCE;
STIFFNESS;
SURFACE PROPERTIES;
TUNING;
CANTILEVER BEAMS;
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EID: 7544234134
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1781381 Document Type: Article |
Times cited : (6)
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References (14)
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