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Volumn 75, Issue 9, 2004, Pages 2903-2905

Reduction of spurious resonance peaks in microcantilever tuning through substrate contact surface reduction

Author keywords

[No Author keywords available]

Indexed keywords

MICROCANTILEVER; SPURIOUS PEAKS; SURFACE AREA; SURFACE REDUCTION;

EID: 7544234134     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1781381     Document Type: Article
Times cited : (6)

References (14)
  • 11
    • 7544239052 scopus 로고    scopus 로고
    • note
    • Probes used in this work were developed from the Tap 300(MPP-11100) cantilever design, and had the following nominal specifications: L=125 μm, W=35 μm, T=4 μm, resonant frequency =300 kHz, spring constant =40 N/m, tip radius =10 nm, tip height =17 μm and tip width =35 μm. While the nominal resonant frequency for the cantilevers is 300 kHz+-100 kHz; the resonant frequency of the individual cantilevers, used in this work were in the range of 390 to 410 kHz.
  • 12
    • 7544235522 scopus 로고    scopus 로고
    • note
    • 2)].
  • 14
    • 7544237904 scopus 로고    scopus 로고
    • Data not reported
    • Data not reported.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.