Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5045, Issue , 2003, Pages 104-111

  Yamanaka, Kazushi ^a   Tsuji, Toshihiro ^a   Irihama, Hiroshi ^a   Mihara, Tsuyoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Linear vibration; Nano scale crack; Nondestructive evaluation; Nonlinear vibration; Opening and closing behavior; Ultrasonic atomic force microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; MATERIALS TESTING; NATURAL FREQUENCIES; ULTRASONICS; VIBRATION MEASUREMENT;

NONLINEAR VIBRATION ANALYSIS;

NONDESTRUCTIVE EXAMINATION;

EID: 0242441487     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.483823     Document Type: Conference Paper

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