The geometric design of microbolometer elements for uncooled focal plane arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6542, Issue , 2007, Pages

  Russ M ^a   Bauer, J ^a   Vogt, H ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Amorphous silicon; Design optimization; Focal plane arrays; MEMS; Microbolometer; Optical cavity

Indexed keywords

AMORPHOUS SILICON; BOLOMETERS; COMPUTATIONAL GEOMETRY; COST REDUCTION; FILM THICKNESS; INFRARED ABSORPTION; MACHINE DESIGN; MEMS;

FABRY PEROT RESONATOR; MICROBOLOMETER ELEMENTS; OPTICAL CAVITY; THERMAL ISOLATION;

FOCAL PLANE ARRAYS;

EID: 35649017151     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.719224     Document Type: Conference Paper

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