Size effect on electronic sputtering of LiF thin films

Journal of Applied Physics

Volumn 102, Issue 8, 2007, Pages

  Kumar, Manvendra ^a   Khan, S A ^a   Rajput, Parasmani ^a   Singh, F ^a   Tripathi, A ^a   Avasthi, D K ^a   Pandey, A C ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC CONSTANTS; GRAIN SIZE AND SHAPE; LITHIUM COMPOUNDS; SPUTTERING; THICKNESS MEASUREMENT; THIN FILMS;

ELASTIC RECOIL DETECTION; ELECTRONIC SPUTTERING; INELASTIC THERMAL SPIKE; SPUTTER YIELD;

POLYCRYSTALLINE MATERIALS;

EID: 35648986630     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2794694     Document Type: Article

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