Nitrogen evolution from copper nitride films by MeV ion impact

Radiation Effects and Defects in Solids

Volumn 154, Issue 2, 2001, Pages 151-163

  Ghosh, S ^a   Tripathi, A ^a   Som, T ^a   Srivastava, S K ^a   Ganesan, V ^b   Gupta, A ^b   Avasthi, D K ^a  

^a INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^b UGC DAE CONSORTIUM FOR SCIENTIFIC RESEARCH   (India)

Author keywords

Copper nitride; Elastic recoil detection analysis; Grain size; Grazing angle X ray diffraction; Reactive sputtering

Indexed keywords

EID: 0242357767     PISSN: 10420150     EISSN: None     Source Type: Journal    
DOI: 10.1080/10420150108214049     Document Type: Article

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