An ultrathin (∼100 μm thick) flexible light plate fabricated using self-alignment and lift-off techniques

Applied Physics Letters

Volumn 91, Issue 18, 2007, Pages

  Chiang, Cheng Chung ^a   Wuu, Dong Sing ^a   Horng, Ray Hua ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ENCAPSULATION; LIGHT EMITTING DIODES; OXYGEN; PERMEATION; SEMICONDUCTING INDIUM COMPOUNDS; WATER;

BACKLIGHT APPLICATIONS; LIFT-OFF TECHNIQUES; PARYLENE TEMPLATE; PHOTODEFINABLE POLYMER;

PLATES (STRUCTURAL COMPONENTS);

EID: 35648967565     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2804001     Document Type: Article

References (13)

1. Y. Chen, J. Au, P. Kazlas, A. Ritenour, H. Gates, and M. McGreary, Nature (London) 423, 136 (2003).
2. A. N. Krasnov, Appl. Phys. Lett. 80, 3853 (2002).
3. N. D. Young, M. J. Trainor, S. Y. Yoon, D. J. McCulloch, R. W. Wilks, A. Pearson, S. Godfrey, P. W. Green, S. Roosendaal, and E. Hallworth, Flexible Electronics-materials and Device Technology, MRS Symposia Proceedings No. 769 (Materials Research Society, Pittsburg, 2003), p. 17.
4. S. Inoue, S. Utsunomiya, T. Saeki, and T. Shimoda, IEEE Trans. Electron Devices 49, 1353 (2002).
5. D. R. Cairns and G. P. Crawford, Proc. IEEE 93, 1451 (2005).
6. J. F. Gaynor, J. J. Senkevich, and S. B. Desu, J. Mater. Res. 11, 1842 (1996).
7. W. Y. Lin, D. S. Wuu, K. F. Pan, S. H. Huang, C. E. Lee, W. K. Wang, S. C. Hsu, Y. Y. Su, S. Y. Huang, and R. H. Horng, IEEE Photonics Technol. Lett. 17, 1809 (2005).
8. T. Minami, T. Miyata, and T. Yamamoto, J. Vac. Sci. Technol. A 17, 1822 (2000).
9. H. Morikawa and M. Fujita, Thin Solid Films 359, 61 (2000).
10. Z. Suo, E. Y. Ma, H. Gleskova, and S. Wagner, Appl. Phys. Lett. 75, 3011 (1999).
11. Z. Suo, E. Y. Ma, H. Gleskova, and S. Wagner, Appl. Phys. Lett. 74, 1177 (1998).
12. T. Sekitani, Y. Kato, S. Iba, H. Shinaoka, T. Someya, T. Sakurai, and S. Takagi, Appl. Phys. Lett. 86, 073511 (2005).
13. C. C. Chiang, D. S. Wuu, H. B. Lin, Y. P. Chen, T. N. Chen, Y. C. Lin, C. C. Wu, W. C. Chen, T. H. Jaw, and R. H. Horng, Surf. Coat. Technol. 200, 5843 (2006).