An atomic level model for silicon anisotropic etching processes: Cellular automaton simulation and experimental verification

Applied Physics Letters

Volumn 91, Issue 17, 2007, Pages

  Zhou, Zai Fa ^a   Huang, Qing An ^a   Li, Wei Hua ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CELLULAR AUTOMATA; COMPUTER SIMULATION; SILICON; SURFACE PROPERTIES;

DYNAMIC ALGORITHM; SIMULATION SYSTEMS; SURFACE ATOMS;

ANISOTROPIC ETCHING;

EID: 35548984893     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2800884     Document Type: Article

References (19)

1. M. Madou, Foundamentals of Microfabrication (CRC, Boca Raton, FL, 1997), Chap. 14, p. 145.
2. C. Liu, Foundations of MEMS (Prentice-Hall, Eaglewood Cliffs, NJ, 2006), Chap 10, p. 326.
3. R. A. Buser and N. F. Rooij, Sens. Actuators, A 28, 71 (1991).
4. C. H. Sequin, Sens. Actuators, A A34, 225 (1992).
5. H. Schroder, E. Obermeier, A. Horn, and G. Wachutka, J. Microelectromech. Syst. 10, 88 (2001).
6. B. Radjenovic, M. Radmilovic-Radjenovic, and M. Mitric, Appl. Phys. Lett. 89, 213102 (2006).
7. O. Than and S. Buttgenbach, Sens. Actuators, A 45, 85 (1994).
8. T. Hubbard and E. K. Antonsson, Sens. Mater. 19, 437 (1997).
9. K. Nishidate, M. Baba, and R. Gayload, Comput. Phys. 12, 88 (1998).
10. Z. Zhu and C. Liu, J. Microelectromech. Syst. 9, 252 (2000).
11. T. Kakinaga, O. Tabata, N. Baba, Y. Isono, J. G. Korvink, and K. H. Ehrmann, IEEJ Trans. Sens. Micromachines 124, 7 (2004).
12. M. A. Gosalvez, R. M. Nieminen, P. Kilpinen, E. Haimi, and V. K. Lindroos, Appl. Surf. Sci. 178, 7 (2001).
13. M. A. Gosalvez, A. S. Foster, and R. M. Nieminen, Appl. Surf. Sci. 202, 160 (2002).
14. H. Camon and Z. Moktadir, Sens. Actuators, A 46, 27 (1995).
15. Z. F. Zhou, Q. A. Huang, W. H. Li, and W. Den, J. Micromech. Microeng. 17, S38 (2007).
16. Z. F. Zhou, Q. A. Huang, W. H. Li, C. Zhu, and D. W. Xu, Proceedings of the IEEE Sensors'06, Daegu, Korea, 2006 (unpublished), pp. 1061-1063.
17. M. A. Gosalvez and M. Nieminen, New J. Phys. 5, 100 (2003).
18. K. A. Jackson, Kinetic Processes: Crystal Growth, Diffusion and Phase Transformations in Materials (Wiley, New York, 2004), Chap. 13, p. 155.
19. Z. F. Zhou, Q. A. Huang, W. H. Li, and W. Lu, IEEE Trans. Comput.-Aided Des. 26, 100 (2007).