Mechanical properties of DLC films prepared by bipolar pulsed DC PACVD

Diamond and Related Materials

Volumn 7, Issue 9, 1998, Pages 1333-1337

  Michler, T ^a   Grischke, M ^a   Traus, I ^a   Bewilogua, K ^a   Dimigen, H ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; ELASTIC MODULI; HARDNESS; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; WEAR RESISTANCE;

CARBON FILMS; DIAMOND-LIKE FILMS;

DIAMOND FILMS;

CARBON; DIAMOND; FILM;

EID: 0032171763     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(98)00203-9     Document Type: Article

References (35)

1. H. Dimigen, H. Hübsch, Philips Tech. Rev. 41 (1983) 186-197.
2. A. Matthews, S.S. Eskildsen, Diamond Rel. Mat. 3 (1994) 902-911.
3. Taube, K., Surf. Coat. Tech. 98 (1998) 976-984.
4. K. Taube, M. Grischke, K. Bewilogua, Surf. Coat. Tech. 68/69 (1994) 662-668.
5. Contact (5), 1996, customs information brochure of Balzers, Lichtenstein.
6. J. Güttler, J. Reschke, Surf. Coat. Tech. 60 (1993) 531-535.
7. D. Hofmann, H. Schuessler, K. Bewilogua, H. Hübsch, J. Lemke, Surf. Coat. Tech. 73 (1995) 137-141.
8. T. Michler, M. Grischke, I. Traus, K. Bewilogua, H. Dimigen, Diamond Rel. Mat. 7 (1998) 459-462.
9. D. Roth, B. Rau, S. Roth, J. Mai, Surf. Coat. Tech. 68/69 (1994) 783-787.
10. R. Grün, H.-J. Günther, Mat. Sci. Eng. A 140 (1991) 435-441.
11. K. Oguri, T. Arai, Surf. Coat. Tech. 47 (1991) 710-721.
12. A. Grill, V.V. Patel, Diamond Films Tech. 1 (4) (1992) 219-233.
13. H. Zaidi, T. Le Huu, F. Robert, R. Bedri, E.K. Kadiri, D. Paulmeier, Surf. Coat. Tech. 76/77 (1995) 564-571.
14. M. Ham, K.A. Lou, J. Vac. Sci. Technol. A 8 (3) (1990) 2143-2149.
15. T. Arai, H. Fujita, K. Oguri, Thin Solid Films 165 (1988) 139-148.
16. Kikuchi, N., Oosawa, Y., A. Nishiyama, Proc. 9th Int. Conf. on CVD, 1984, pp. 728-744.
17. P. Mayr, H.-R. Stock, J. Vac. Sci. Tech. A 4 (6) (1986) 2726-2730.
18. K.-T. Rie, A. Gebauer, J. Wöhle, Surf. Coat. Tech. 60 (1993) 385-388.
19. L. Shizhi, Z. Cheng, X. Xiang, S. Yulong, Y. Hongshun, X. Yan, W. Huang, Surf. Coat. Tech. 43/44 (1990) 1007-1014.
20. Tabersky, R., van den Berg, H., König, U., in: E. Broszeit, W.D. Münz (Eds.), Proc. PSE '88 Vol. 1, DGM, Oberursel, 1988, pp. 133-138.
21. Willich, P., Bethke, R., in: A. Benninghausen et al. (Eds.), Proc. 10th Conf. on Secondary Ion Mass Spectroscopy SIMS, Wiley, Chichester, 1997, pp. 609-612.
22. K. Taube, Adv. Tech. Surf. Eng. 98 (1992) 275-294.
23. C.-P. Klages, R. Memming, Mat. Sci. For. 52/53 (1989) 609-644.
24. A. Bubenzer, B. Dischler, G. Brandt, P. Koidl, J. Appl. Phys. 54 (8) (1983) 4590-4595.
25. Y. Catherine, P. Couderc, Thin Solid Films 144 (1986) 265-280.
26. P. Couderc, Y. Catherine, Thin Solid Films 146 (1987) 93-107.
27. X. Jiang, K. Reichelt, B. Stritzker, J. Appl. Phys. 66 (12) (1989) 5805-5808.
28. A.K. Gangopadhay, W.C. Vassell, M.A. Tamor, P.A. Willermet, J. Tribol. 116 (1994) 454-462.
29. N. Mutsukura, K. Miyatani, Diamond Rel. Mat. 4 (1995) 342-345.
30. N. Mutsukura, K. Yoshida, Diamond Rel. Mat. 5 (1996) 919-922.
31. N. Mutsukura, K. Yoshida, Diamond Rel. Mat. 6 (1997) 547-550.
32. M. Fryda, C. Benndorf, C.-P. Klages, K. Taube, Diamond Rel. Mat. 1 (1992) 558-562.
33. E.H.A. Dekempeneer, R. Jacobs, J. Smeets, J. Meneve, L. Eersels, B. Blanplain, J. Roos, D.J. Oostra, Thin Solid Films 217 (1992) 56-61.
34. E.H.A. Dekempeneer, L. Eersels, J. Smeets, J. Meneve, R. Jacobs, B. Blanplain, J. Roos, Diamond Rel. Mat. 2 (1993) 272-277.
35. M. Fryda, K. Taube, C.-P. Klages, Vacuum 41 (4)5)6) (1990) 1291-1293.