Fabrication of high aspect-ratio polymer microstructures for large-area electronic portal X-ray imagers

Sensors and Actuators, A: Physical

Volumn 140, Issue 2, 2007, Pages 185-193

  Daniel, J H ^a   Sawant, A ^b   Teepe, M ^a   Shih, C ^a   Street, R A ^a   Antonuk, L E ^b  

^a PALO ALTO RESEARCH CENTER   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

High aspect ratio; Large area MEMS; Polymer MEMS; Scintillator; SU 8; X ray imaging

Indexed keywords

ASPECT RATIO; DRUG DELIVERY; IMAGING TECHNIQUES; PATIENT MONITORING; POLYMERS; QUANTUM EFFICIENCY; RADIOTHERAPY;

ELECTRONIC PORTAL IMAGING DEVICES (EPID); HIGH ASPECT RATIO; PATIENT LOCALIZATION; X-RAY IMAGING;

MICROSTRUCTURE;

EID: 35348979107     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.06.027     Document Type: Article

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