Large area MEMS: Materials issues and applications

Materials Research Society Symposium Proceedings

Volumn 685, Issue , 2001, Pages 35-40

  Daniel, J H ^a   Street, R A ^a   Teepe, M ^a   Ready, S E ^a   Ho, J ^a   Wang, Y ^a   Rodkin, A ^a   Alimonda, A ^a   Apte, R B ^a   Goredema, A ^b   Boils Boissier, D C ^b   Kazmaier, P M ^b  

^a PALO ALTO RESEARCH CENTER   (United States)

^b XEROX RESEARCH CENTRE OF CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; GLASS; IMAGE SENSORS; MICROMACHINING; SILICON WAFERS; X RAY DIFFRACTION ANALYSIS;

ELECTROPHORETIC DISPLAY; LARGE AREA APPLICATIONS; MICRO-CELLS; SU-8;

MEMS;

EID: 34249876348     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-685-d2.5.1     Document Type: Conference Paper

References (7)

1. SU-8 is distributed by MicroChem Corp, 1254 Chestnut Street, Newton, MA 02164
2. J.H. Daniel, B. Krusor, R. Lau, J.P. Lu, Y. Wang, M. Mulato, R.B. Apte, R.A. Street, A. Goredema, D.C. Boils-Boissier, S.E. Silver, P.M. Kazmaier, Materials Research Society Symposium, November 26-29, Boston, MA
3. J.T. Rahn, F. Lemmi, R.L. Weisfield, R. Lujan, P. Mei, J.P. Lu, J. Ho, S.E. Ready, R.B. Apte, P. Nylen, J. Boyce, and R.A. Street, SPIE, Vol 3659, p. 510 (1999)
4. dpiX, LLC, 406 Hillview Ave., Palo Alto, CA 94304
5. th Int. Symposium, October 2-6, Boston, MA
6. E. Kishi, Y. Matsuda, Y. Uno, A. Ogawa, T. Goden, N. Ukigaya, M. Nakanishi, T. Ikeda, H. Matsuda, and K. Eguchi, SID'00 Digest, Long Beach, CA May 2000, pp. 24-27
7. S.A. Swanson, M.W. Hart, and J.G. Gordon, SID'00 Digest, Long Beach, CA May 2000, pp. 29-31