Parametric investigation of Laser-Assisted Direct Imprint (LADI) technique

Materials Science Forum

Volumn 505-507, Issue PART 1, 2006, Pages 307-312

  Lin, C Y ^a   Lee, Y C ^a   Hsiao, F B ^a   Chuang, C H ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Excimer laser; Fluence; Imprinted depth; Laser assisted direct imprinting

Indexed keywords

EXCIMER LASERS; MICROMACHINING; NANOTECHNOLOGY; PHOTOLITHOGRAPHY;

IMPRINTED DEPTH; LASER ASSISTED DIRECT IMPRINTING; LASER MICRO MACHINING SYSTEM; QUANTITATIVE DATA;

NANOIMPRINT LITHOGRAPHY;

LASERS; LITHOGRAPHY; MACHINING;

EID: 35348921178     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-990-3.307     Document Type: Conference Paper

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