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Volumn 556-557, Issue , 2007, Pages 541-544
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The mechanism of interface state passivation by no
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Author keywords
Interface; MOS; Nitridation; Oxide
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Indexed keywords
ALUMINUM NITRIDE;
INTERFACES (MATERIALS);
MOLYBDENUM;
NITRIDATION;
OXIDES;
PASSIVATION;
SILICON CARBIDE;
COMPLEX PROCESSES;
INTERFACE STATE PASSIVATION;
SIC/SIO2-INTERFACES;
THEORETICAL STUDY;
INTERFACE STATES;
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EID: 35348878174
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/MSF.556-557.541 Document Type: Conference Paper |
Times cited : (3)
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References (9)
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