Improved overlay control through automated high order compensation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6518, Issue PART 1, 2007, Pages

  Wakamoto, S ^a   Ishii, Y ^a   Yasukawa, K ^a   Sukegawa, A ^a   Maejima, S ^b   Kato, A ^c   Robinson, J C ^c   Eichelberger, B J ^c   Izikson, P ^c   Adel, M ^c  

^a NIKON CORPORATION   (Japan)

^b RENESAS TECHNOLOGY CORP   (Japan)

^c KLA TENCOR CORPORATION   (United States)

Author keywords

GCM (Grid Compensation for Matching); Mix and match; Overlay; Scanner; SDM (Super Distortion Matching); SMM (Scanner Match Maker)

Indexed keywords

ERROR ANALYSIS; LIGHTING; PROCESS CONTROL; SCANNING; SEMICONDUCTOR DEVICE MANUFACTURE;

GRID COMPENSATION FOR MATCHING (GCM); SCANNER MATCH MAKERS (SMM); SUPER DISTORTION MATCHING (SDM);

OPTICS;

EID: 35148893594     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.712710     Document Type: Conference Paper

References (7)

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