Introduction of new techniques for matching overlay enhancement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4346, Issue 2, 2001, Pages 1608-1616

  Kikuchi, Takahisa ^a   Ishii, Yuuki ^a   Tokuda, Noriaki ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

GCM; Inter shot error; Intra shot error; Mix Match overlay; SDM

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DATA STRUCTURES; ERROR ANALYSIS; HARDWARE; LENSES; SCANNING; SEMICONDUCTOR MATERIALS; SERVERS;

SUPER DISTORTION MATCHING SYSTEMS (SDM); WAFER SCANNERS;

LITHOGRAPHY;

EID: 0035758822     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.435702     Document Type: Conference Paper

References (0)