Mix and match overlay method by compensating dynamic scan distortion error

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5378, Issue , 2004, Pages 221-227

  Kono, Takuya ^a   Takakuwa, Manabu ^a   Asanuma, Keita ^a   Komine, Nobuhiro ^a   Higashiki, Tatsuhiko ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

APC system; Dynamic scan distortion; Mix and match

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; ERROR ANALYSIS; LENSES; PARAMETER ESTIMATION; RANDOM PROCESSES; SCANNING;

APC SYSTEM; DYNAMIC SCAN DISTORTION; MIX AND MATCH; OVERLAY METHODS;

PROCESS CONTROL;

EID: 2942661932     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.535097     Document Type: Conference Paper

References (0)