Boundary conditioning of capacitive MEMS devices through fabrication methods and operating environments

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5062, Issue 2, 2002, Pages 806-813

  Muthukumaran, P ^a   Stiharu, I ^a   Bhat, R B ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

Boundary conditioning; Dynamic behavior; Electrostatic field; MEMS; Microfabrication; Microsystems

Indexed keywords

BOUNDARY CONDITIONS; DAMPING; DEPOSITION; ELASTICITY; ELECTROSTATICS; RESIDUAL STRESSES; SENSORS; STIFFNESS; THERMAL CYCLING;

LORENTZ FORCE; MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 1342290835     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Van der Donk, A.G.H., Scheeper, P.R., Olthuis, W. and Bergveld, P., "Modeling of silicon condenser microphones", Sensors and Actuators, 40, pp. 203 - 216, 1994.
2. Muthukumaran, P., R.B. Bhat and I. Stiharu "Boundary Conditioning Technique for Structural Tuning", Jrl. of Sound and Vibration, 220(5), pp. 847-859, 1999.
3. Bhat, R.B., "Natural frequencies of rectangular plates using characteristics orthogonal polynomials in Rayleigh_Ritz Method", Jrl. of Sound and Vibration, 102(4), pp.493-499, 1985.