Computation of static shapes and voltages for micromachined deformable mirrors with nonlinear electrostatic actuators

Journal of Microelectromechanical Systems

Volumn 5, Issue 3, 1996, Pages 205-220

  Wang, P K C ^{a,b,c,d,e,f,g,h,i,j,k}   Hadaegh, F Y ^a,c,h,l,m,n  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^d CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

^f IBM RESEARCH   (United States)

^g University of Southern California ^*

^h Department of Electrical Engineering ^*

ⁱ ECOLE CENTRALE DE NANTES   (France)

^j Dept Plasma Phys Controlled N   (France)

^k NANKAI UNIVERSITY   (China)

^l UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^m UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

ⁿ Automation and Control Section

more..

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGORITHMS; ELECTROSTATIC DEVICES; INVERSE PROBLEMS; MATHEMATICAL MODELS; MICROMACHINING; MIRRORS; PARTIAL DIFFERENTIAL EQUATIONS; PROBLEM SOLVING; SURFACE PROPERTIES;

MICROMACHINED DEFORMABLE MIRRORS; NONLINEAR ELECTROSTATIC ACTUATORS; STATIC SHAPES; SURFACE DEFORMATION; VOLTAGES;

MICROELECTROMECHANICAL DEVICES;

EID: 0030245947     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.536627     Document Type: Article

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