Characteristics of molecular hydrogen and CH*radicals in a methane plasma in a magnetically enhanced capacitive RF discharge

Plasma Physics Reports

Volumn 33, Issue 9, 2007, Pages 774-785

  Avtaeva, S V ^a   Lapochkina, T M ^a  

^a KYRGYZ RUSSIAN SLAVIC UNIVERSITY   (Kyrgyzstan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34848878317     PISSN: 1063780X     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063780X07090073     Document Type: Article

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