Compensation of the piezo-Hall effect in integrated Hall sensors on (100)-Si

IEEE Sensors Journal

Volumn 7, Issue 11, 2007, Pages 1475-1482

  Ausserlechner, Udo ^b   Motz, Mario ^a,b   Holliber, Michael ^b  

^a IEEE

^b INFINEON TECHNOLOGIES AUSTRIA AG   (Austria)

Author keywords

Magnetic sensitivity drift; Mechanical stress compensation; Package stress; Piezo hall; Piezo resistance

Indexed keywords

DIES; DRIFT CHAMBERS; MAGNETIC FIELDS; MAGNETIC SENSORS; PIEZOELECTRIC DEVICES; SILICON; STRESSES;

HALL SENSORS; MAGNETIC SENSITIVITY DRIFTS; MOLD COMPOUNDS; PIEZO HALL EFFECTS; PIEZO RESISTANCE; PLASTIC PACKAGES;

HALL EFFECT;

EID: 34748909992     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2007.907039     Document Type: Article

References (16)

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