Nonlinear iterative learning control with applications to lithographic machinery

Control Engineering Practice

Volumn 15, Issue 12, 2007, Pages 1545-1555

  Heertjes, Marcel ^a,b   Tso, Tim ^c  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c ASML   (Netherlands)

Author keywords

Feedforward control; Iterative learning control; Lifted system approach; Lithographic machinery; Lyapunov theory; Nonlinear control

Indexed keywords

FEEDFORWARD CONTROL; ITERATIVE METHODS; LEARNING ALGORITHMS; LEARNING SYSTEMS; LITHOGRAPHY; LYAPUNOV METHODS;

ITERATIVE LEARNING CONTROL; LIFTED SYSTEM APPROACH; LITHOGRAPHIC MACHINERY;

NONLINEAR CONTROL SYSTEMS;

FEEDFORWARD CONTROL; ITERATIVE METHODS; LEARNING ALGORITHMS; LEARNING SYSTEMS; LITHOGRAPHY; LYAPUNOV METHODS; NONLINEAR CONTROL SYSTEMS;

EID: 34748842012     PISSN: 09670661     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.conengprac.2007.03.005     Document Type: Article

References (23)

1. Bamieh B., Boyd P.J., Francis B.A., and Tannenbaum A. A lifting technique for linear periodic systems with applications to sampled-data control. Systems and Control Letters 17 (1991) 79-88
2. Bien Z., and Xu J.-X. Iterative learning control-analysis, design, integration and applications (1998), Kluwer Academic Publishers, Boston
3. Bristow D.A., Tharayil M., and Alleyne A.G. A survey of iterative learning control-a learning-based method for high-performance tracking. IEEE Control Systems Magazine 96 (2006) 114
4. ∞ approach. In Proceedings of the 35th conference on decision and control (pp. 3044-3049). Kobe, Japan.
5. Dijkstra, B. G. (2004). Iterative learning control with applications to a wafer stage. Ph.D. thesis, Delft.
6. Dijkstra B.G., and Bosgra O.H. Extrapolation of optimal lifted system ILC solution, with application to a waferstage. Proceedings of the American control conference (2002), Anchorage, AK 2595-2600
7. French M., and Rogers E. Non-linear iterative learning by an adaptive Lyapunov technique. International Journal of Control 73 10 (2000) 840-850
8. Ghosh J., and Paden B. A pseudoinverse-based iterative learning control. IEEE Transactions on Automatic Control 47 5 (2002) 831-837
9. Gunnarsson S., and Norrlöf M. On the design of ILC algorithms using optimization. Automatica 37 (2001) 2011-2016
10. Moore K.L. Iterative learning control-an expository overview. Applied and Computational Controls, Signal Processing and Circuits (1998) 425-488
11. Moore K.L. An iterative learning control algorithm for systems with measurement noise. IEEE proceedings in conference on decision and control (1999), Phoenix, AZ 270-275
12. Moore K.L., Chen Y.-Q., and Bahl V. Monotonically convergent iterative learning control for linear discrete-time systems. Automatica 41 (2005) 1529-1537
13. Moore, K. L., & Xu, J.-X. (Eds.) (2000). Special issue on iterative learning control. International Journal of Control, 73(10), 819-999.
14. Norrlöf, M. (2000). Iterative learning control-analysis, design, and experiments. Ph.D. thesis, Linköping, Sweden.
15. Phan M.Q., and Longman R.W. A mathematical theory of learning control of linear discrete multivariable systems. Proceedings of the AIAA/AAS astrodynamics specialist conference (1988), Minneapolis 740-746
16. Rotariu I., Ellenbroek R., and Steinbuch M. Time-frequency analysis of a motion system with learning control. IEEE proceedings of the American control conference (2003), Denver, Colorado 3650-3654
17. Rotariu, I., Dijkstra, B. G., Steinbuch, M. 2004. Comparison of standard and lifted ILC on a motion system. In Proceedings of the third IFAC symposium on mechatronic systems. Sydney, Australia.
18. Tayebi A., and Islam S. Adaptive iterative learning control for robot manipulators: Experimental results. Control Engineering Practice 14 7 (2006) 843-851
19. Tomizuka M., Tsao T.C., and Chew K.K. Discrete-time domain analysis and synthesis of repetitive controllers. Journal of Dynamic Systems, Measurement, and Control 111 (1989) 353-358
20. Tousain, R. L., Van de Meché, E. 2001. Design strategies for iterative learning control based on optimal control. In Proceedings of the 40th conference on decision and control (pp. 4463-4468). Orlando, Florida.
21. ∞ / μ feedback control design for high-precision wafer stage motion. Control Engineering Practice 10 (2002) 739-755
22. Xu J.-X., and Tan Y. Linear and nonlinear iterative learning control (2003), Springer, Berlin, Heidelberg
23. Yakubovich V.A., Leonov G.A., and Gelig A.K.h. Stability of stationary sets in control systems with discontinuous nonlinearities (2004), World Scientific, Singapore