Fatigue of damascene copper lines under cyclic electrical loading

Microelectronic Engineering

Volumn 84, Issue 11, 2007, Pages 2658-2662

  Moreau, S ^a   Maitrejean, S ^a   Passemard, G ^b  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

Author keywords

Alternative current; Damascene copper line; Interconnect; Reliability; Thermal fatigue

Indexed keywords

COPPER; ELECTRIC LOADS; ELECTRIC POWER SYSTEM INTERCONNECTION; STRESS ANALYSIS; THERMAL FATIGUE;

CYCLIC ELECTRICAL LOADING; DAMASCENE COPPER LINES; THERMAL STRAINS;

ELECTRIC LINES;

EID: 34548845306     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.05.046     Document Type: Article

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