Surface reconstruction of aluminum metallization. A new potential wearout mechanism

Volumn , Issue , 1971, Pages 120-128

  PHILOFSKY E, ^a   RAVI K, ^a   HALL E, ^a   BLACK J, ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS, RELIABILITY;

SEMICONDUCTOR DEVICES--RELIABILITY;

EID: 0015203264     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (0)