SCOPUS 정보 검색 플랫폼

Volumn 18, Issue 35, 2007, Pages

High aspect ratio silicon nanomoulds for UV embossing fabricated by directional thermal oxidation using an oxidation mask

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MASKS; MOLDING; OXIDATION; PHOTOLITHOGRAPHY; POLYDIMETHYLSILOXANE; SILICON;

NANOEMBOSSING; NANOMOULDING; SILICON ETCHING;

NANOSTRUCTURED MATERIALS;

DIMETICONE; GOLD; SILICON; SILICON NITRIDE;

ANALYTIC METHOD; ARTICLE; CHEMICAL ANALYSIS; CHEMICAL BINDING; ELECTRODE; NANOANALYSIS; OXIDATION KINETICS; PRIORITY JOURNAL; ULTRAVIOLET RADIATION;

EID: 34548679169 PISSN: 09574484 EISSN: 13616528 Source Type: Journal
DOI: 10.1088/0957-4484/18/35/355307 Document Type: Article

Times cited : (9)

References (14)

1
- 0036873980
- Bao L R, Cheng X, Huang X D, Guo L J, Pang S W and Yee A F 2002 J. Vac. Sci. Technol. B 20 2881
- (2002) J. Vac. Sci. Technol. , vol.20 , Issue.6 , pp. 2881
- Bao, L.R.¹ Cheng, X.² Huang, X.D.³ Guo, L.J.⁴ Pang, S.W.⁵ Yee, A.F.⁶

2
- 0142037327
- Chou S Y, Krauss P R and Renstrom P J 1995 Appl. Phys. Lett. 67 3114
- (1995) Appl. Phys. Lett. , vol.67 , Issue.21 , pp. 3114
- Chou, S.Y.¹ Krauss, P.R.² Renstrom, P.J.³

3
- 18144430264
- Yan X M, Kwon S, Contreras A M, Bokor J and Somorjai G A 2005 Nano Lett. 5 745
- (2005) Nano Lett. , vol.5 , Issue.4 , pp. 745
- Yan, X.M.¹ Kwon, S.² Contreras, A.M.³ Bokor, J.⁴ Somorjai, G.A.⁵

4
- 0000996008
- Resnick D J, Dauksher W J, Mancini D P, Nordquist K J and Ainley E S 2002 Proc. SPIE Int. Soc. Opt. Eng. 4688 205
- (2002) Proc. SPIE Int. Soc. Opt. Eng. , vol.4688 , pp. 205
- Resnick, D.J.¹ Dauksher, W.J.² Mancini, D.P.³ Nordquist, K.J.⁴ Ainley, E.S.⁵

5
- 2542450309
- Resnick D J, Mancini D P, Nordquist K J and Dauksher W J 2004 J. Microlith. Microfab. Microsyst. 3 316
- (2004) J. Microlith. Microfab. Microsyst. , vol.3 , Issue.2 , pp. 316
- Resnick, D.J.¹ Mancini, D.P.² Nordquist, K.J.³ Dauksher, W.J.⁴

6
- 8644286735
- Choi W M and Park O O 2004 Appl. Phys. Lett. 85 3310
- (2004) Appl. Phys. Lett. , vol.85 , Issue.15 , pp. 3310
- Choi, W.M.¹ Park, O.O.²

7
- 0035793890
- Jacobs H O and Whitesides G M 2001 Science 291 1763
- (2001) Science , vol.291 , Issue.5509 , pp. 1763
- Jacobs, H.O.¹ Whitesides, G.M.²

8
- 0031165657
- Kim E, Xia Y, Zhao X M and Whiteside G M 1997 Adv. Mater. 9 651
- (1997) Adv. Mater. , vol.9 , Issue.8 , pp. 651
- Kim, E.¹ Xia, Y.² Zhao, X.M.³ Whiteside, G.M.⁴

9
- 0011403139
- Saitou N 1996 Int. J. Japan. Soc. Prec. Eng. 30 107
- (1996) Int. J. Japan. Soc. Prec. Eng. , vol.30 , pp. 107
- Saitou, N.¹

10
- 0030231388
- Matsui S and Ochiai Y 1996 Nanotechnology 7 247
- (1996) Nanotechnology , vol.7 , Issue.3 , pp. 247
- Matsui, S.¹ Ochiai, Y.²

11
- 0026403033
- Tandon U S, Pant B D and Kumar A 1991 Vacuum 42 1219
- (1991) Vacuum , vol.42 , Issue.18 , pp. 1219
- Tandon, U.S.¹ Pant, B.D.² Kumar, A.³

12
- 0036643932
- Fay B 2002 Microelectron. Eng. 61-62 11
- (2002) Microelectron. Eng. , vol.61-62 , Issue.1-4 , pp. 11
- Fay, B.¹

13
- 0035906180
- Love J C, Paul K E and Whitesides G M 2001 Adv. Mater. 13 604
- (2001) Adv. Mater. , vol.13 , Issue.8 , pp. 604
- Love, J.C.¹ Paul, K.E.² Whitesides, G.M.³

14
- 34250684641
- Fabrication of thin-film organic transistor on flexible substrate via UV transfer embossing
- Zhang J, Li C M, Chan-Park M B, Zhou Q, Gan Y, Qin F, Ong B and Chen T 2007 Fabrication of thin-film organic transistor on flexible substrate via UV transfer embossing Appl. Phys. Lett. 90 243502
- (2007) Appl. Phys. Lett. , vol.90 , Issue.24 , pp. 243502
- Zhang, J.¹ Li, C.M.² Chan-Park, M.B.³ Zhou, Q.⁴ Gan, Y.⁵ Qin, F.⁶ Ong, B.⁷ Chen, T.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.