Self-aligned formation of nano-holes to arrayed micro glass tubes

Electrochimica Acta

Volumn 53, Issue 1, 2007, Pages 200-204

  Sato, Hirotaka ^a   Yamaguchi, Takuya ^a   Isobe, Tetsuhiko ^a   Homma, Takayuki ^a   Shoji, Shuichi ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Arrayed microstructure; Etching; Maskless nanofabrication; Microreactor; Silicon micromachining

Indexed keywords

CONCENTRATION (PROCESS); ETCHING; FILTRATION; NANOTECHNOLOGY; OPTIMIZATION; OXIDATION;

LIQUID SPECIMEN; MICRO GLASS TUBES; NONLINEAR DIFFUSION; SELF ALIGNED FORMATION; THERMAL OXIDATION;

FLUIDIC DEVICES;

EID: 34548579193     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2007.02.075     Document Type: Article

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