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Electrochimica Acta

Volumn 51, Issue 5, 2005, Pages 844-848

Picoliter volume glass tube array fabricated by Si electrochemical etching process

(5) Sato, Hirotaka a Homma, Takayuki a Mori, Kentaro a Osaka, Tetsuya a Shoji, Shuichi a

a WASEDA UNIVERSITY (Japan)

Author keywords

Electrochemical nanofabrication; MEMS; Microreactor; Picoliter volume glass tube array; Si electrochemical etching

Indexed keywords

CHEMICAL REACTORS; CHROMIUM; ETCHING; GLASS; GOLD; LIGHTING; MASKS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; OXIDATION; SILICA; SURFACE TREATMENT;

ELECTROCHEMICAL NANOFABRICATION; MEMS; MICROREACTORS; PICOLITER VOLUME GLASS TUBE ARRAY; SI ELECTROCHEMICAL ETCHING;

ELECTROCHEMISTRY;

EID: 27644432731 PISSN: 00134686 EISSN: None Source Type: Journal
DOI: 10.1016/j.electacta.2005.04.067 Document Type: Conference Paper

Times cited : (5)

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