Microfabrication and imaging XPS analysis of ITO thin films

Surface and Interface Analysis

Volumn 39, Issue 9, 2007, Pages 756-760

  Li, Ying ^a   Zhao, Gaoyang ^a   Zhi, Xiao ^a   Zhu, Tao ^a  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Imaging XPS; ITO thin films; Microfabrication; XPS

Indexed keywords

CHEMICAL MODIFICATION; DOPING (ADDITIVES); IMAGE QUALITY; MICROFABRICATION; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM LEACHING; FILM PATTERNING; IMAGING XPS ANALYSIS; TIN-DOPED INDIUM OXIDE (ITO);

THIN FILMS;

EID: 34548570096     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2585     Document Type: Article

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