Hydrocarbon film growth by energetic CH 3 molecule impact on SiC (0 0 1) surface

Applied Surface Science

Volumn 253, Issue 20, 2007, Pages 8517-8523

  Gou, F ^a   Chuanliang, Meng ^c   Zhouling, Z T ^a   Qian, Qiu ^b  

^a GUIZHOU UNIVERSITY   (China)

^b Huaxi Hospital of Traditional Chinese medicine   (China)

^c NONE

Author keywords

Hydrocarbon; Molecular dynamics methods; Plasma based ion implantation and deposition

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; HYDROCARBONS; ION IMPLANTATION; MOLECULAR DYNAMICS; SILICON CARBIDE;

ATOMIC DENSITY; IMPACT ENERGIES; INCIDENT ENERGY; MOLECULAR DYNAMICS METHODS;

THIN FILMS;

EID: 34548548638     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.04.023     Document Type: Article

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