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Volumn 7, Issue 6, 1998, Pages 858-863
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Molecular dynamics studies of a-C:H film growth by energetic hydrocarbon molecule impact
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Author keywords
Acetylene; Amorphous hydrogenated carbon; Computer simulation; Ion beam growth
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Indexed keywords
COMPUTER SIMULATION;
DIAMONDS;
FILM GROWTH;
HYDROCARBONS;
MOLECULAR DYNAMICS;
SUBSTRATES;
THIN FILMS;
MOLECULE IMPACTS;
CARBON;
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EID: 0032093655
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(97)00314-2 Document Type: Article |
Times cited : (10)
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References (24)
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