Combined magnetron sputtering and ECR-CVD deposition of diamond-like carbon films

Surface and Coatings Technology

Volumn 157, Issue 2-3, 2002, Pages 179-184

  Chang, J F ^a,c   Ueng, H Y ^a   Young, T F ^a   Wang, Y C ^b   Hwang, W C ^c  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b DEPARTMENT OF PHYSICS   (Taiwan)

^c NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Diamond like carbon (DLC); ECR; Raman; Sputtering

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; HARDNESS; HYDROCARBONS; MAGNETRON SPUTTERING; STEEL;

FILM DEPOSITION;

DIAMOND LIKE CARBON FILMS;

CARBON; HYDROCARBON; STEEL;

DIAMOND-LIKE CARBON; FILM; SPUTTERING; TRIBOLOGY; WEAR RESISTANCE;

CORRELATION ANALYSIS; CYCLOTRON; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; FILM; FLOW RATE; HARDNESS; RAMAN SPECTROMETRY;

EID: 0037158668     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00157-3     Document Type: Article

References (13)