Interest of broadband optical monitoring for thin-film filter manufacturing

Applied Optics

Volumn 46, Issue 20, 2007, Pages 4294-4303

  Badoil, Bruno ^a   Lemarchand, Fabien ^a   Cathelinaud, Michel ^a   Lequime, Michel ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BROADBAND NETWORKS; PHOTODETECTORS; QUARTZ; REFRACTIVE INDEX; SIGNAL TO NOISE RATIO; SPECTROMETRY;

ARRAY DETECTORS; BROADBAND OPTICAL MONITORING; QUARTER-WAVE HIGH-PASS FILTERS; THIN-FILM FILTERS;

HIGH PASS FILTERS;

EID: 34548497439     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.004294     Document Type: Article

References (17)

1. H. A. Macleod, "Monitoring of optical coatings," Appl. Opt. 20, 82-89 (1981).
2. C. Buzeal and K. Robbie, "State of the art in thin film thickness and deposition rate monitoring sensors," Rep. Prog. Phys. 68, 385-409 (2005).
3. H. D. Polster, "Symmetrical all-dielectric interference filter," J. Opt. Soc. Am. 42, 21-24 (1952).
4. http://www.leyboldoptics.com/en/oms5000.html.
5. S. N. Jasperson, D. K. Burge, and R. C. O'Handley, "A modulated ellipsometer for studying thin film optical properties and surface dynamics," Surf. Sci. 37, 548-558 (1973).
6. M. Cathelinaud, F. Lemarquis, and C. Amra, "Index determination of opaque and semitransparent metallic films. Application to light absorber," Appl. Opt. 41, 2546-2554 (2002).
7. D. Ristau, T. Gross, and M. Lappschies, "Optical broadband monitoring of conventional and ion process," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper TuE1.
8. D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, "Optical broadband monitoring of conventional and ion processes," Appl. Opt. 45, 1495-1501 (2006).
9. X. Q. Hu, Y. M. Chen, and J. F. Tang, "Apparatus for wideband monitoring of optical coatings and its uses," Appl. Opt. 28, 2886-2888 (1989).
10. S. Wilbrandt, N. Kaiser, and O. Stenzel, "In situ broadband monitoring of heterogeneous optical coatings," Thin Solid Films 502, 153-157 (2006).
11. S. Wilbrandt, R. Leitel, D. Gabler, O. Stenzel, and N. Kaiser, "In situ broadband monitoring and characterization of optical coatings," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper TuE6.
12. A. V. Tikhonravov, M. K. Trubetskov, and T. Amotchkina, "Investigation of the effect of accumulation of thickness errors in optical coating production using broadband optical monitoring," Appl. Opt. 45, 7026-7034 (2006).
13. K. B. Walsh, J. A. Guthrie, and J. W. Burney, "Application of commercially available, low cost, miniaturized NIR spectrometers to the assessment of the sugar content of intact fruit," Aust. J. Plant. Physiol. 27, 1175-1186 (2000).
14. A. Zoeller, "Substantial progress in optical monitoring by intermittent measurement technique," in Advances in Optical Thin Films II, Proc. SPIE 5963, 59630D (2005).
15. F. Lemarchand, C. Deumie, M. Zerrad, L. Abel-Tiberini, B. Bertussi, B. Lazaridès, M. Cathelinaud, M. Lequime, and C. Amra, "Optical characterization of an unknown single layer: Institut Fresnel contribution to OIC 2004 measurement problem," in Optical Interference Coatings (Optical Society of America, 2006), pp. 1312-1318, paper WE9.
16. H. A. Macleod, Thin-Film Optical Filters, 2nd ed. (Hilger, 1986).
17. Fused silica refractive index data: http://en.wikipedia.org/wiki/ Fused_quartz.