Substantial progress in optical monitoring by intermittent measurement technique

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5963, Issue , 2005, Pages

  Zoeller, A ^a   Boos, M ^a   Goetzelmann, R ^a   Hagedom, H ^a   Klug, W ^a  

^a Leybold Optics   (Germany)

Author keywords

Band pass filters; Direct optical monitoring; Fluorescence microscopy; Intermittent monitoring; Laser coatings; Magnetron sputtering; Optical coatings; Plasmia IAD

Indexed keywords

DIRECT OPTICAL MONITORING; FLUORESCENCE MICROSCOPY; INTERMITTENT MONITORING; LASER COATINGS; PLASMIA-IAD;

BANDPASS FILTERS; FLUORESCENCE; MAGNETRON SPUTTERING; MIRRORS; MULTILAYERS; OPTICAL BEAM SPLITTERS; OPTICAL COATINGS;

OPTICAL SYSTEMS;

EID: 33144485067     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.624865     Document Type: Conference Paper

References (16)

1. H.A. Mac Leod, "Evolution of the measurement of Thin Films", Optics & Photonics News, Sept. 2001, 20-25
2. M. Banning, "Practical methods of making and using multilayer filters", J. Opt. Soc. Am., 42, 1947, 21-5
3. Ch. Dufour, Le Vide, 3 (1948), 480.
4. L. Holland, "Vacuum Deposition of Thin Films", Chapman and Hall, London, 1952, 308-319
5. H. D. Polster, J. opt. Soc. Amer., 42 (1952), 21.
6. P. Giacomo, P. Jaquinot, J. Phys. Radium, 13 (1952), 59A.
7. R. Hermann, A.Zoeller, "Automated control of optical layer fabrication processes", SPIE Vol. 401, 1983, 93-96
8. B. Vidal, A. Fornier, E. Pelletier, "Optical monitoring of nonquaterwave multilayer filters", Appl. Optics, Vol. 17, 1038, 1978
9. K. Starke, T. Gross, M. Lappschies, D. Ristau, "Rapid Prototyping of Optical Thin Film Filters",SPIE, Vol. 4094, 83, 2000
10. H. A. Mac Leod "Thin-Film Optical Filters", IOP Publishing ISBN 0 7503 0688 2, 1986, 499-522
11. A. Zoeller et al., "Optical thickness monitoring of dielectric optical filters using a new in-situ photometer with high signal resolution and excellent long term stability", SPIE Vol. 1019-14, 1988, 106-113
12. th top. Meeting 2004, TuE8
13. th ann. Conf. proc., 2004
14. A. Zoeller, R. Goetzelmann, W. Klug, K. Matl, "Plasma ion assisted deposition: a powerful technology for the production of optical coatings," SPIE, Vol. 3133-23, 1997
15. M. Scherer, H. Hagedorn, W. Lehnert, J. Pistner, "Innovative production of thin film laser components", SPIE Vol.5963-45, 2005
16. H. Chui, "Advances in Optical Filters for Life Sciences", Photonics Spectra, Jan. 2005, 63-66