Optical characterization of an unknown single layer: Institut Fresnel contribution to the Optical Interference Coatings 2004 Topical Meeting Measurement Problem

Applied Optics

Volumn 45, Issue 7, 2006, Pages 1312-1318

  Lemarchand, Fabien ^a   Deumié, Carole ^a   Zerrad, Myriam ^a   Abel Tiberini, Laëtitia ^a   Bertussi, Bertrand ^a   Georges, Gaëlle ^a   Lazaridès, Basile ^a   Cathelinaud, Michel ^a   Lequime, Michel ^a   Amra, Claude ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FUSED SILICA; LIGHT SCATTERING; OPTICAL RESOLVING POWER; REFRACTIVE INDEX;

ANGLE-RESOLVED SCATTERING MEASUREMENTS; OPTOGEOMETRICAL PARAMETERS; SPATIAL RESOLUTION;

OPTICAL COATINGS;

EID: 33645321390     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001312     Document Type: Article

References (10)

1. J. P. Borgogno, B. Lazaridès, and P. Roche, "An improved method for the determination of the extinction coefficient of thin film materials," Thin Solid Films 101, 209-220 (1983).
2. L. Abel-Tiberini, F. Lemarquis, and M. Lequime, "Dedicated spectrophotometer for localized transmittance and reflectance measurements," (in this issue).
3. C. Deumié, R. Richier, P. Dumas, and C. Amra, "Multiscale roughness in optical multilayers: atomic force microscopy and light scattering," Appl. Opt. 35, 5583-5594 (1996).
4. Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, "Cross-characterization of surface microroughness using near field microscopies and optical techniques," Europhys. Lett. 22, 717-722 (1993).
5. C. Amra, D. Torricini, and P. Roche, "Multiwavelength (0.45-10.6 μm) angle-resolved scatterometer or how to extend the optical window," Appl. Opt. 32, 5462-5474 (1993).
6. C. Amra, "Light scattering from multilayer optics. I. Tools of investigation," J. Opt. Soc. Am. A 11, 197-210 (1994).
7. C. Amra, P. Roche, and E. Pelletier, "Interface roughness cross-correlation laws deduced from scattering diagram measurements on optical multilayers: effect of the material grain size," J. Opt. Soc. Am. B 4, 1087-1093 (1987).
8. D. S. Kassam, A. Duparré, K. Hehl, P. Bussemer, and J. Neubert, "Light scattering from the volume of optical thin films: theory and experiment," Appl. Opt. 31, 1304-1313 (1992).
9. M. Elson, J. P. Rahn, and J. M. Bennett, "Light scattering from multilayer optics: comparison of theory and experiment," Appl. Opt. 19, 669-679 (1980).
10. S. Jackobs, A. Duparre, and H. Truckenbrodt, "AFM and light scattering measurement of thin films for applications in the UV spectral region," Int. J. Mach. Tools Manuf. 35, 147-153 (1997).