Optical broadband monitoring of conventional and ion processes

Applied Optics

Volumn 45, Issue 7, 2006, Pages 1495-1501

  Ristau, Detlev ^a   Ehlers, Henrik ^a   Gross, Tobias ^a   Lappschies, Marc ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; BROADBAND NETWORKS; CHARGE COUPLED DEVICES; MONOCHROMATORS; SPECTROPHOTOMETERS; ULTRAVIOLET RADIATION;

CCD ARRAYS; FLUORIDE COATINGS; ION-ASSISTED DEPOSITION; OPTICAL BROADBAND;

OPTICAL SYSTEMS;

EID: 33645284157     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001495     Document Type: Article

References (19)

1. B. Vidal, A. Former, and E. Pelletier, "Optical monitoring of non-quarter-wave multilayer filters," Appl. Opt. 17, 1038-1047 (1978).
2. B. Vidai, A. Fornier, and E. Pelletier, "Wideband optical monitoring of non-quarter-wave multilayer filters," Appl. Opt. 18, 3851-3856 (1979).
3. I. Powell, J. C. M. Zwinkels, and A. R. Robertson, "Development of optical monitor for control of thin-film deposition," Appl. Opt. 25, 3645-3652 (1986).
4. F. J. van Milligen, B. Bovard, M. R. Jacobson, J. Mueller, R. Potoff, R. L. Shoemaker, and H. A. Macleod, "Development of an automated scanning monochromator for monitoring thin films," Appl. Opt. 24, 1799-1802 (1985).
5. R. P. Netterfield, P. J. Martin, and K.-H Müller, "In-situ optical monitoring of thin film deposition," Proc. SPIE 1012, 10-15 (1988).
6. G. Emiliani, A. Piegari, and E. Masetti, "Fast scan spectrometer for monitoring of thin film optical properties," Proc. SPIE 1012, 35-46 (1988).
7. H. H. Bauer and E. Nüssler, "In-situ optical multichannel spectrometer system," Proc SPIE 2253, 423-431 (1994).
8. M. Tilsch, V. Scheuer, J. Staub, and T. Tschudi, "Direct optical monitoring instrument with double detection system for the control of multilayer systems from the visible to the near infrared," Proc. SPIE 2253, 414-422 (1994).
9. B. T. Sullivan and J. A. Dobrowolski, "Deposition error compensation for optical multilayer coatings: II. Experimental results-sputtering system," Appl. Opt. 32, 2351-2360 (1993).
10. K. Starke, T. Groß, and D. Ristau, "Rapid prototyping of optical thin film filters," in Conference on Optical and Infrared Thin Films, Proc. SPIE 4094, 83-92 (2000).
11. M. Lappschies, T. Groß, H. Ehlers, and D. Ristau, "Broadband optical monitoring for the deposition of complex coatings," in Proceedings of the Conference on Advances in Optical Thin Films, Proc. SPIE 5250, 637-645 (2004).
12. 3: fluoride multilayer coatings production," in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 2001), paper ME9.
13. D. Ristau and St. Günster, "Optimization of optical coatings for the UV/VUV-range," in Proceedings of the Conference on Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, Proc. SPIE 5188, 80-95 (2003).
14. J. A. Dobrowolski, has presented papers at OSA conferences on optical interference coatings in 1995, 1998, 2001 and 2004.
15. M. Lappschies, B. Görtz, and D. Ristau, "Application of optical broadband monitoring to quasi-rugate filters by ion beam sputtering," presented at the Topical Meeting on Optical Interference Coatings, Tucson, Ariz., 27 June-2 July, 2004.
16. J. Freisinger, H. W. Löb, and A. Scharmann: "Rf-ion beam source RIM-10 for material processing," Kerntechnik 51, 125-128 (1987).
17. M. Dieckmann, Spektrum: Thin Film Design Software. 1990-2005.
18. SyrusPro and APSPro are registered trade marks of Leybold Optics GmbH, Alzenau, Germany.
19. Product of Leybold Optics GmbH, Alzenau, Germany.