Investigation of the effect of accumulation of thickness errors in optical coating production by broadband optical monitoring

Applied Optics

Volumn 45, Issue 27, 2006, Pages 7026-7034

  Tikhonravov, Alexander V ^a   Trubetskov, Michael K ^a   Amotchkina, Tatiana V ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ERROR ANALYSIS; ONLINE SYSTEMS; RANDOM ERRORS; SYSTEMATIC ERRORS; THICKNESS MEASUREMENT;

ON-LINE ALGORITHMS; OPTICAL MONITORING; THICKNESS ERRORS;

OPTICAL COATINGS;

EID: 33750559827     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.007026     Document Type: Article

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