SCOPUS 정보 검색 플랫폼

Volumn 253, Issue 24, 2007, Pages 9483-9488

Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases

(5) Huang, Yongxian a Tian, Xiubo a,b Yang, Shiqin a,b Fu, Ricky K Y c Chu, Paul K c

a HARBIN INSTITUTE OF TECHNOLOGY (China)

b Shenzhen Tech Innovation International (China)

c CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

Alumina films; Crack resistance; Optical properties; Plasma immersion ion implantation and deposition; Rutherford backscattering spectrometry

Indexed keywords

ABSORPTION; ADHESION; ALUMINA; CRACK CLOSURE; DEGRADATION; ENERGY GAP; MICROFABRICATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROMETRY;

BOMBARDMENT; KAPTON POLYMERS; PLASMA IMMERSION ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROMETRY;

THIN FILMS;

EID: 34548472014 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2007.06.011 Document Type: Article

Times cited : (20)

References (33)

1
- 0034159672
- Tagawa M., Yokota K., Ohmae N., and Kinoshita H. High Perform. Polym. 12 (2000) 53
- (2000) High Perform. Polym. , vol.12 , pp. 53
- Tagawa, M.¹ Yokota, K.² Ohmae, N.³ Kinoshita, H.⁴

2
- 10644232968
- Hoflund G.B., and Everett M.L. Appl. Surf. Sci. 239 (2005) 367
- (2005) Appl. Surf. Sci. , vol.239 , pp. 367
- Hoflund, G.B.¹ Everett, M.L.²

3
- 0038825337
- Grossman E., and Gouzman I. Nucl. Instrum. Methods B 208 (2003) 48
- (2003) Nucl. Instrum. Methods , vol.B 208 , pp. 48
- Grossman, E.¹ Gouzman, I.²

4
- 0030562159
- Skurat V.E., Barbashev E.A., Dorofeev Yu.I., Nikiforov A.P., Gorelova M.M., and Pertsyn A.I. Appl. Surf. Sci. 92 (1996) 441
- (1996) Appl. Surf. Sci. , vol.92 , pp. 441
- Skurat, V.E.¹ Barbashev, E.A.² Dorofeev, Yu.I.³ Nikiforov, A.P.⁴ Gorelova, M.M.⁵ Pertsyn, A.I.⁶

5
- 0033513831
- Iskanderova Z.A., Kleiman J.I., Gudimenko Y., Tkachenko A., Tennyson R.C., Brown I.G., and Monteiro O.R. Nucl. Instrum. Methods B 148 (1999) 1090
- (1999) Nucl. Instrum. Methods , vol.B 148 , pp. 1090
- Iskanderova, Z.A.¹ Kleiman, J.I.² Gudimenko, Y.³ Tkachenko, A.⁴ Tennyson, R.C.⁵ Brown, I.G.⁶ Monteiro, O.R.⁷

6
- 0001036514
- Brown I.G., Anders A., Anders S., Dickinson M.R., and MacGill R.A. J. Vac. Sci. Technol. B 12 2 (1994) 823
- (1994) J. Vac. Sci. Technol. , vol.B 12 , Issue.2 , pp. 823
- Brown, I.G.¹ Anders, A.² Anders, S.³ Dickinson, M.R.⁴ MacGill, R.A.⁵

7
- 36449000220
- Brown I.G. Rev. Sci. Instrum. 65 (1994) 3061
- (1994) Rev. Sci. Instrum. , vol.65 , pp. 3061
- Brown, I.G.¹

8
- 0038751592
- Ueda M., Tan I.H., Dallaqua R.S., Rossi J.O., Barroso J.J., and Tabacniks M.H. Nuc. Instrum. Methods B 206 (2003) 760
- (2003) Nuc. Instrum. Methods , vol.B 206 , pp. 760
- Ueda, M.¹ Tan, I.H.² Dallaqua, R.S.³ Rossi, J.O.⁴ Barroso, J.J.⁵ Tabacniks, M.H.⁶

9
- 0030288186
- Chu P.K., Qin S., Chan C., Cheung N.W., and Larson L.A. Mater. Sci. Eng. Reports 17 (1996) 207
- (1996) Mater. Sci. Eng. Reports , vol.17 , pp. 207
- Chu, P.K.¹ Qin, S.² Chan, C.³ Cheung, N.W.⁴ Larson, L.A.⁵

10
- 0032740567
- Dong H., and Bell T. Surf. Coat. Technol. 111 (1999) 29
- (1999) Surf. Coat. Technol. , vol.111 , pp. 29
- Dong, H.¹ Bell, T.²

11
- 0037159168
- Lim H.E., Lee Y.H., Han S.H., Kim Y.W., Cho J.H., and Kim K.J. Surf. Coat. Technol. 160 (2002) 158
- (2002) Surf. Coat. Technol. , vol.160 , pp. 158
- Lim, H.E.¹ Lee, Y.H.² Han, S.H.³ Kim, Y.W.⁴ Cho, J.H.⁵ Kim, K.J.⁶

12
- 34548479244
- Santos D.C.R., Rangel R.C.C., Mota R.P., Cruz N.C., Schreiner W.H., and Rangel E.C. Mater. Res. 7 (2004) 493
- (2004) Mater. Res. , vol.7 , pp. 493
- Santos, D.C.R.¹ Rangel, R.C.C.² Mota, R.P.³ Cruz, N.C.⁴ Schreiner, W.H.⁵ Rangel, E.C.⁶

13
- 24044527161
- Zhang W., Chu P.K., Ji J.H., Zhang Y.H., Liu X.Y., Fu R.K.Y., Ha P.C.T., and Yan Q. Biomater. 27 (2006) 44
- (2006) Biomater. , vol.27 , pp. 44
- Zhang, W.¹ Chu, P.K.² Ji, J.H.³ Zhang, Y.H.⁴ Liu, X.Y.⁵ Fu, R.K.Y.⁶ Ha, P.C.T.⁷ Yan, Q.⁸

14
- 30744457622
- Zhang W., Chu P.K., Ji J.H., Zhang Y.H., Fu R.K.Y., and Yan Q. Polym. 47 (2006) 931
- (2006) Polym. , vol.47 , pp. 931
- Zhang, W.¹ Chu, P.K.² Ji, J.H.³ Zhang, Y.H.⁴ Fu, R.K.Y.⁵ Yan, Q.⁶

15
- 34247522927
- Chu P.K. IEEE Trans. Plasma Sci. 35 (2007) 181
- (2007) IEEE Trans. Plasma Sci. , vol.35 , pp. 181
- Chu, P.K.¹

16
- 0033299219
- Lee S., Tien Y.C., and Hsu C.F. Plasma Polym. 4 (1999) 229
- (1999) Plasma Polym. , vol.4 , pp. 229
- Lee, S.¹ Tien, Y.C.² Hsu, C.F.³

17
- 0033908258
- Amor S.B., Baud G., Jacquet M., Nansé G., Fioux P., and Nardin M. Appl. Surf. Sci. 153 (2000) 172
- (2000) Appl. Surf. Sci. , vol.153 , pp. 172
- Amor, S.B.¹ Baud, G.² Jacquet, M.³ Nansé, G.⁴ Fioux, P.⁵ Nardin, M.⁶

18
- 2342475792
- Musket R.G., and Felter T.E. Nucl. Instrum. Methods B 219-220 (2004) 379
- (2004) Nucl. Instrum. Methods , vol.B 219-220 , pp. 379
- Musket, R.G.¹ Felter, T.E.²

19
- 34548495543
- M. Mayer, SIMNRA User's Guide, Report IPP 9/113, Max-Planck-Institut für Plasmaphysik, Garching, Germany, 1997.

20
- 0028195235
- Kim Y.C., Park H.M., Chun J.S., and Lee W.J. Thin Solid Films 237 (1994) 57
- (1994) Thin Solid Films , vol.237 , pp. 57
- Kim, Y.C.¹ Park, H.M.² Chun, J.S.³ Lee, W.J.⁴

21
- 0025209406
- Baumann S.M., Martner C.C., Martin D.W., and Blattner R.J. Nucl. Instrum. Methods B 45 (1990) 664
- (1990) Nucl. Instrum. Methods , vol.B 45 , pp. 664
- Baumann, S.M.¹ Martner, C.C.² Martin, D.W.³ Blattner, R.J.⁴

22
- 1142281032
- Shamala K.S., Murthy L.C.S., and Narasimha Rao K. Mater. Sci. Eng. B 106 (2004) 269
- (2004) Mater. Sci. Eng. , vol.B 106 , pp. 269
- Shamala, K.S.¹ Murthy, L.C.S.² Narasimha Rao, K.³

23
- 0020635576
- Mittal K.L. (Ed), Plenum Press, New York p. 19-44
- Packham D.E. In: Mittal K.L. (Ed). Adhesion Aspects of Polymeric Coatings (1983), Plenum Press, New York p. 19-44
- (1983) Adhesion Aspects of Polymeric Coatings
- Packham, D.E.¹

24
- 84945604539
- Buchwalter L.P. J. Adhesion Sci. Technol. 4 (1990) 697
- (1990) J. Adhesion Sci. Technol. , vol.4 , pp. 697
- Buchwalter, L.P.¹

25
- 36448999703
- Lossy R., Pappas D.L., Roy R.A., Cuomo J.J., and Sura V.M. Appl. Phys. Lett. 61 (1992) 171
- (1992) Appl. Phys. Lett. , vol.61 , pp. 171
- Lossy, R.¹ Pappas, D.L.² Roy, R.A.³ Cuomo, J.J.⁴ Sura, V.M.⁵

26
- 0032318143
- Laux S., Kaiser N., Zöller A., Götzelmann R., Lauth H., and Bernitzki H. Thin Solid Films 335 (1998) 1
- (1998) Thin Solid Films , vol.335 , pp. 1
- Laux, S.¹ Kaiser, N.² Zöller, A.³ Götzelmann, R.⁴ Lauth, H.⁵ Bernitzki, H.⁶

27
- 0034159270
- Schuler P., Mojazza H.B., and Haghighat R. High Perform. Polym. 12 (2000) 113
- (2000) High Perform. Polym. , vol.12 , pp. 113
- Schuler, P.¹ Mojazza, H.B.² Haghighat, R.³

28
- 33645763715
- Chiang C.C., Wu D.S., Lin H.B., Chen Y.P., Chen T.N., Lin Y.C., Wu C.C., Chen W.C., Jaw T.H., and Horng R.H. Surf. Coat. Technol. 200 (2006) 5843
- (2006) Surf. Coat. Technol. , vol.200 , pp. 5843
- Chiang, C.C.¹ Wu, D.S.² Lin, H.B.³ Chen, Y.P.⁴ Chen, T.N.⁵ Lin, Y.C.⁶ Wu, C.C.⁷ Chen, W.C.⁸ Jaw, T.H.⁹ Horng, R.H.¹⁰

29
- 0042357375
- Panjan P., Čekada M., and Navinšek B. Surf. Coat. Technol. 174-175 (2003) 55
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 55
- Panjan, P.¹ Čekada, M.² Navinšek, B.³

30
- 0000296945
- Shih C.J., Nesterenko V.F., and Meyers M.A. J. Appl. Phys. 83 (1998) 4660
- (1998) J. Appl. Phys. , vol.83 , pp. 4660
- Shih, C.J.¹ Nesterenko, V.F.² Meyers, M.A.³

31
- 0029256917
- Weiss H. Surf. Coat. Technol. 71 (1995) 201
- (1995) Surf. Coat. Technol. , vol.71 , pp. 201
- Weiss, H.¹

32
- 0037204384
- Lee W.-J., Lee Y.-S., Rha S.-K., Lee Y.-J., Lim K.-Y., Chung Y.-D., and Whang C.-N. Appl. Surf. Sci. 205 (2003) 128
- (2003) Appl. Surf. Sci. , vol.205 , pp. 128
- Lee, W.-J.¹ Lee, Y.-S.² Rha, S.-K.³ Lee, Y.-J.⁴ Lim, K.-Y.⁵ Chung, Y.-D.⁶ Whang, C.-N.⁷

33
- 33748429933
- Marot G., Lesage J., Démarécaux Ph., Hadad M., Siegmann St., and Stai M.H. Surf. Coat. Technol. 201 (2006) 2080
- (2006) Surf. Coat. Technol. , vol.201 , pp. 2080
- Marot, G.¹ Lesage, J.² Démarécaux, Ph.³ Hadad, M.⁴ Siegmann, St.⁵ Stai, M.H.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.