Aluminum plasma immersion ion implantation in polymers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 760-766

  Ueda, M ^a   Tan, I H ^a   Dallaqua, R S ^a   Rossi, J O ^a   Barroso, J J ^a   Tabacniks, M H ^b  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Oxidation; Plasma immersion ion implantation; Polymers; Vacuum arcs

Indexed keywords

ALUMINUM; CONTAMINATION; ELECTRIC POTENTIAL; ION IMPLANTATION; OXIDATION; PLASMA APPLICATIONS; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY;

PLASMA IMMERSION ION IMPLANTATION;

POLYMERS;

EID: 0038751592     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00844-9     Document Type: Conference Paper

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