Micro-end-milling of single-crystal silicon

International Journal of Machine Tools and Manufacture

Volumn 47, Issue 14, 2007, Pages 2111-2119

  Rusnaldy, ^a   Ko, Tae Jo ^a   Kim, Hee Sool ^a  

^a Yeungnam University   (South Korea)

Author keywords

Cutting forces analysis; Ductile and brittle cutting mode; Micro end milling

Indexed keywords

BRITTLENESS; CRYSTAL ORIENTATION; DUCTILITY; POLYNOMIAL APPROXIMATION; SILICON; SINGLE CRYSTALS;

CUTTING FORCES ANALYSIS; DIAMOND-COATED TOOLS; DUCTILE MACHINING TECHNOLOGY; MICRO-END-MILLING;

MICROMACHINING;

EID: 34548359263     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2007.05.003     Document Type: Article

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