Modelling and experimental investigation on nanometric cutting of monocrystalline silicon

International Journal of Machine Tools and Manufacture

Volumn 45, Issue 15, 2005, Pages 1681-1686

  Fang, F Z ^a   Wu, H ^a   Liu, Y C ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Brittle material; Micro machining; Modelling; Nano cutting

Indexed keywords

BRITTLENESS; CRYSTALLINE MATERIALS; EXTRUSION; INDENTATION; MATHEMATICAL MODELS; MICROMACHINING; MOLECULAR DYNAMICS; NANOTECHNOLOGY; PERFORMANCE; SHEARING; SILICON;

MACHINING PERFORMANCE; MODELING; MONOCRYSTALLINE SILICON; NANO CUTTING;

CUTTING;

EID: 25144470660     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2005.03.010     Document Type: Article

References (34)

1. W.S. Blackley, and R.O. Scattergood Ductile regime model for diamond turning of brittle materials Precision Engineering 13 2 1991 95 102
2. G. Byrne, D. Dornfeld, and B. Denkena Advancing cutting technology Annals of the CIRP 52 2 2003 483 507
3. Y. Furukawa, and N. Moronuki Effect of material properties on ultra-precise cutting processes Annals of the CIRP 37 1 1988 113 116
4. T. Shibata, S. Fujii, E. Makino, and M. Ikeda Ductile-regime turning mechanism of single crystal silicon Precision Engineering 18 3 1996 129 137
5. D.A. Taminiau, and J.H. Dautzenberg Bluntness of the tool and process forces in high-precision cutting Annals of the CIRP 40 1 1991 65 68
6. D.A. Lucca, R.L. Rhorer, and R. Komanduri Energy dissipation in the ultra-precision machining of copper Annals of the CIRP 40 1 1991 69 72
7. F.Z. Fang, and G.X. Zhang An experimental study of edge radius effect on cutting single crystal silicon International Journal of Advance Manufacturing Technology 22 2003 703 707
8. T. Inamura, N. Takezawa, and N. Taniguchi Atomic-scale cutting in a computer using crystal models of copper and diamond Annals of the CIRP 41 1 1992 117 120
9. T. Inamura, N. Takezawa, Y. Kumaki, and N. Ikawa Mechanics and energy dissipation in nanoscale cutting Annals of the CIRP 40 1 1993 65 68
10. D.A. Lucca, R. Seo, and R. Komanduri Effect of tool edge geometry on energy dissipation in ultaprecision machining Annals of the CIRP 42 1 1993 83 86
11. F.Z. Fang, and Y.C. Liu On minimum exit-burr in micro cutting Journal of Micromechanics and Microengineering 14 2004 984 988
12. Z.J. Yuan, L. Geng, and S. Dong Ultra-precision machining of SiCw/Al composites Annals of the CIRP 42 1 1993 107 110
13. T. Inamura, N. Takezawa, Y. Kumaki, and T. Sata On a possible mechanism of shear deformation in nanoscale cutting Annals of the CIRP 43 1 1994 47 50
14. F.Z. Fang, and V.C. Venkatesh Diamond cutting of silicon with nanometric finish Annals of the CIRP 47 1 1998 45 49
15. D.A. Lucca, P. Chou, and R.J. Hocken Effect of tool edge geometry on the nanometric cutting of Ge Annals of the CIRP 47 1 1998 475 478
16. K.B. Kwon, D.W. Cho, S.J. Lee, and C.N. Chu A fluid dynamic analysis model of the ultra-precision cutting mechanism Annals of the CIRP 48 1 1999 43 46
17. F.Z. Fang, and L. Chen Ultra-precision cutting for ZKN7 glass Annals of the CIRP 49 1 2000 17 20
18. W. Gao, R.J. Hocken, J.A. Patten, and J. Lovingood Nano-machining instrument for nano-cutting of brittle materials Annals of the CIRP 49 1 2000 439 442
19. F.Z. Fang, Cutting edge effect in micro machining, Presentation to the Cutting Committee Meeting (Part II) in 52nd CIRP General Assembly, Spain, 2002
20. A. Mallock The action of cutting tools Proceedings of the Royal Society of London 33 1881 127
21. H. Ernst, and M.E. Merchant Chip formation, friction and high quality machined surface Surface Treatment of Metals 29 1941 299
22. M.E. Merchant Basic mechanics of the metal cutting process Journal of Applied Mechanics Review A11 1944 168 175
23. J. Tresoff New empirical model for the structural properties of silicon Physical Review Letters 56 1986 632 635
24. Y.Y. Ye, R. Biswas, J.R. Morris, A. Bastawros, and A. Chandra Molecular dynamics simulation of nanoscale machining of copper Nanotechnology 14 2003 390 396
25. Z.C. Lin, and J.C. Huang A nano-orthogonal cutting model based on a modified molecular dynamics technique Nanotechnology 15 2004 510 519
26. R. Komanduri, N. Chandrasekaran, and L.M. Raff MD Simulation of exit failure in nanometric cutting Materials Science and Engineering A311 2001 1 12
27. S. Shimada, N. Ikawa, G. Ohmori, H. Tanaka, and J. Uchikoshi Molecular dynamics analysis as compared with experimental results of micromachining Annals of the CIRP 41 1 1992 113 116
28. S. Shimada, N. Ikawa, H. Tanaka, G. Ohmori, J. Uchikoshi, and H. Yoshinaga Feasibility study on ultimate accuracy in microcutting using molecular dynamics simulation Annals of the CIRP 42 1 1993 91 94
29. T. Inamura, S. Shimada, N. Takezawa, and N. Nakahara Brittle/ductile transition phenomena observed in computer simulations of machining defect-free monocrystalline silicon Annals of the CIRP 46 1 1997 31 34
30. R. Komanduri, N. Chandrasekaran, and L.M. Raff Orientation effects in nanometric cutting of single crystal materials: an MD simulation approach Annals of the CIRP 48 1 1999 67 70
31. W.C.D. Cheong, and L.C. Zhang Molecular dynamics simulation of phase transformations in silicon monocrystals due to nano-indentation Nanotechnology 11 2000 173 180
32. L.C. Zhang, and I. Zarudi Towards a deeper understanding of plastic deformation in mono-crystalline silicon International Journal of Mechanical Sciences 43 2001 1985 1996
33. B. Lawn Fracture of Brittle Solids 1993 Cambridge University Press Cambridge
34. B. Bhushan, and X. Li Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices Journal of Materials Research 12 1997 54 63