Polyimide as the pedestal of batch fabricated micro-ball lens and micro-mushroom array category: Micro opto electro mechanical systems

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 337-340

  Lin, Y S ^a   Pan, C T ^a   Lin, K L ^a   Chen, S C ^a   Yang, J J ^a   Yang, J P ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TREATMENT; MICROELECTROMECHANICAL DEVICES; OPTOELECTRONIC DEVICES; PHOTORESISTS; POLYIMIDES; SUBSTRATES;

MICRO-MUSHROOM ARRAYS;

MICROLENSES;

EID: 0035007873     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)