Micromachined piezoresistive tactile sensor array fabricated by bulk-etched MUMPs process

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 1, Issue , 2004, Pages 351-354

  Tuantranont, Adisorn ^a,b   Lomas, Tanom ^a   Bright, V M ^c  

^a NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

^b NATIONAL SCIENCE AND TECHNOLOGY DEVELOPMENT AGENCY   (Thailand)

^c University of Colorado at Boulder   (United States)

Author keywords

Bulk etching; Force Sensor Array; MEMS; MUMPs; Piezoresistive; Tactile Sensors

Indexed keywords

ARRAYS; ETCHING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; PRODUCT DESIGN; SCANNING ELECTRON MICROSCOPY;

BULK-ETCHING; FORCE SENSOR ARRAY; MEMS; MUMPS; PIEZORESISTIVE; TACTILE SENSORS;

MICROSENSORS;

EID: 6344260506     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. B. L. Gray and R.S. Fearing "A surface micromachined microtactile sensor array". Proceedings of IEEE International Conference on Robotics and Automation, Minneapolis, Minnesota, pp. 1-6, 1996.
2. R. H. Liu, L. Wang, and D. J. Beebe "Progress towards a smart skin: fabrication and preliminary testing". Proceedings of International Conference of the IEEE Engineering in Medicine and Biology Society, Vol. 20, No. 4, pp. 1841-1844, 1998.
3. B. J. Kane, M. R. Cutkosky and G. T. A. Kovacs "A traction stress sensor array for use in high-resolution robotic tactile imaging". Journal of Microelectromechanical Systems, Vol. 9, No. 4, pp. 425-434, 2000.
4. G. T. A. Kovacs, Micromachined Transducer Sourcebook, WCB McGraw-Hill, New York, 1998.
5. L. A. Liew, A. Tuantranont, and V. M. Bright "Modeling of thermal actuation in a bulk-micromachined CMOS micromirror". Microelectronics Journal, 31, pp. 791-801, 2000.
6. D. A. Koester, R. Mahadevan, and K. W. Markus "Multi-user MEMS process (MUMPs): introduction and design rules, rev.4" MCNC MEMS Technical Application Center, Research Triangle Park, NC, 1996.
7. A. Tuantranont, L. A. Liew, V. M. Bright, J. L. Zhang, W. Zhang, and Y. C. Lee "Bulk-etched surface micromachined and flip chip integrated micromirror array for infrared applications". Proceedings of IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, pp. 71-72, 2000.