Characterization study of bonded and unbonded polydimethylsiloxane aimed for bio-microelectromechanical systems-related applications

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 6, Issue 2, 2007, Pages

  Liu, Miao ^a   Chen, Quanfang ^a  

^a University of Central Florida   (United States)

Author keywords

Bonding strength; Mechanical properties; Mixing ratios; PDMS

Indexed keywords

BOND STRENGTH (CHEMICAL); CHARACTERIZATION; CURING; ELASTIC MODULI; INTERFACES (MATERIALS);

BONDED COUPLES; BONDING STRENGTH; CURING AGENTS; MIXING RATIOS;

POLYDIMETHYLSILOXANE;

EID: 34548045082     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2731381     Document Type: Article

References (14)

1. B. Michel, A. Bernard, A. Bietsch, E. Delamarche, M. Geissler, D. Juncker, H. Kind, J.-P. Renault, H. Rothuizen, H. Schmid, P. Schmidt-Winkel, R. Stutz, and H. Wolf, "Printing meets lithography: Soft approaches to high-resolution patterning," IBM J. Res. Dev. 45(5), 697-719 (2001).
2. G. M. Whitesides, E. Ostuni, S. Takayama, X. Jiang, and D. E. Ingber, "Soft lithography in biology and biochemistry," Annu. Rev. Biomed. Eng. 3, 335-373 (2001).
3. D. S.-W. Park, K. Kim, B. Pillans, and J.-B. Lee, " Polydimethylsiloxane-based pattern transfer process for the post-IC integration of MEMS onto CMOS chips," J. Micromech. Microeng. 14, 335-340 (2004).
4. J.-H. Kim, K.-H. Na, C. J. Kang, and Y-S. Kim, "A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass," Sens. Actuators, A 120(2), 365-369 (2005).
5. A. Yamaguchi, P. Jin, H. Tsuchiyama, T. Masuda, K. Sun, S. Matsuo, and H. Misawa, "Rapid fabrication of electrochemical enzyme sensor chip using polydimethylsiloxane microfluidic channel," Anal. Chim. Acta 468(1), 143-152 (2002).
6. T. Fujii, "PDMS-based microfluidic devices for biomedical applications," Microelectron. Eng. 61-62, 907-914 (2002).
7. Y. S. Shin, K. Cho, S. H. Lim, S. Chung, S.-J. Park, C. Chung, D.-C. Han, and J. K. Chang, "PDMS-based micro PCR chip with Parylene coating," J. Micromech. Microeng. 13, 768-774 (2003).
8. L. Ceriotti, N. F. de Rooij, and E. Verpoorte, "An integrated fritless column for on-chip capillary electrochromatography with conventional stationary phases," Anal. Chem. 74(3), 639-647 (2002).
9. X. Yu, D. Zhang, T. Li, L. Hao, and X. Li, "3-D microarrays biochip for DNA amplification in polydimethylsiloxane (PDMS) elastomer," Sens. Actuators, A 108, 103-107 (2003).
10. GE silicones, RTV 615 datasheet.
11. M. A. Unger, H.-P. Chou, T. Thorsen, A. Scherer, and S. R. Quake, "Monolithic microfabricated valves and pumps by multilayer soft lithography," Science 288, 113-116 (2000).
12. X. Yang, C. Grosjean, Y.-C. Tai, and C.-M. Ho, "A MEMS thermopneumatic silicone rubber membrane valve," Sens. Actuators, A 64(1), 101-108 (1998).
13. B. Yang, J. W. Levis, and Q. Lin, "A PDMS-based constant-flowrate microfluidic control device," 17th IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS), pp. 379-382 (2004).
14. B. T. Ginn and O. Steinbock, "Polymer surface modification using microwave-oven-generated plasma," Langmuir 19, 8117-8118 (2003).