Recessed electrodes formed by laser ablation of parylene coated, micromachined silicon probes

Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings

Volumn 5, Issue , 1997, Pages 2273-2276

  Weiland, James D ^a   Anderson, David J ^a   Pogatchnik, Chris C ^a   Boogaard, Jerry J ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC IMPEDANCE; FINITE ELEMENT METHOD; FUNCTIONAL ELECTRIC STIMULATION; INTERFACES (MATERIALS); IRIDIUM COMPOUNDS; LASER ABLATION; MATHEMATICAL MODELS; PLASMA ETCHING; PROBES;

CHARGE STORAGE CAPACITY; IMPEDANCE SPECTROSCOPY; IRIDIUM OXIDE; PARYLENE COATING; SILICON PROBES;

MICROELECTRODES;

EID: 0031294103     PISSN: 05891019     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)