MEMS prototyping using RF sputtered films

Indian Journal of Pure and Applied Physics

Volumn 45, Issue 4, 2007, Pages 326-331

  Chandra, Sudhir ^a   Bhatt, Vivekanand ^a   Singh, Ravindra ^a   Sharma, Preeti ^a   Pal, Prem ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

^b Yonsei University   (South Korea)

Author keywords

Dielectric films; MEMS microstructures; Perfect convex corner; Piezoelectric films; RF sputtering

Indexed keywords

EID: 34547977641     PISSN: 00195596     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (13)

1. Singh R, Chandra S, Sharma S, Tripathi A K & Goel T C, IEEE Tran. Diele, and Ele. Insu, 11 (2004) 264.
2. Maissel L, Glang R, Handbook of Thin Film Technology, Chap. 4, p. 15. McGraw- Hill, 1970.
3. Pal Prem, Young-Jun Kim & Chandra Sudhir, Sensor Lett, 4 (2006)1.
4. Bhatt Vivekanand & Chandra Sudhir, Proceedings, Int Workshop on Phys. of Sem. Devices (IWPSD-2003), pp 740-742, 2003.
5. Sharma Preeti, Koul S K & Chandra Sudhir, International Conference on Smart Materials, Chiang Mai, Thailand, December 1-3, 2004, pp 331-333, 2004.
6. Pal Prem & Chandra Sudhir, J Micromechanics & Microengineering, 14 (2004) 1416.
7. Pal Prem & Chandra Sudhir, Sensor Lett, 2 (2004) 226.
8. Chandra Sudhir, Bhatt Vivekanand & Jha S K, Int J Comput Engg. Sci., 4 (2003) 521.
9. Pal Prem & Chandra Sudhir, J Micromechanics & Microengineering, 15 (2005) 1536.
10. Singh Ravindra, Kumar Mahesh & Chandra Sudhir, to appear in J of Mater Sci.
11. Bhatt Vivekanand, Pal Prem & Chandra Sudhir, Surface & Coating Tech, 198 (2005) 308.
12. Singh Ravindra, Chakarborty B R, Nahar Singh, Rashmi, Harish Bahadur, Goel T C & Chandra Sudhir, Int Workshop on Phys of Semiconductor Devices, NPL, New Delhi, (2005).
13. Pal Prem & Chandra Sudhir, Smart Materials and Structures, 13 (2004) 1424.