Single layer Al-Ni interconnections for TFT-LCDs using direct contacts with ITO and a-Si

Digest of Technical Papers - SID International Symposium

Volumn 38, Issue 1, 2007, Pages 1713-1716

  Kugimiya, Toshihiro ^a   Yoneda, Yoichiro ^a   Yoshikawa, Kazuo ^a   Gotoh, Hiroshi ^b   Kawakami, Nobuyuki ^b  

^a Sputtering Target Division   (Japan)

^b KOBE STEEL LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; NICKEL ALLOYS; NITRIDATION; SILICON; THIN FILM TRANSISTORS;

INTERCONNECTION LINES; ITO;

LIQUID CRYSTAL DISPLAYS;

EID: 34547932046     PISSN: 0097966X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1889/1.2785656     Document Type: Conference Paper

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