Nanometer-scale investigation of Al-based alloy films for thin-film transistor liquid crystal display arrays

Materials Research Society Symposium - Proceedings

Volumn 471, Issue , 1997, Pages 99-104

  Takatsuji, H ^a   Iiyori, Hideo ^a   Tsuji, S ^a   Tsujimoto, K ^a   Kuroda, K ^a   Saka, H ^a  

^a IBM JAPAN LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; ANNEALING; ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY OF SOLIDS; INTERMETALLICS; LIQUID CRYSTAL DISPLAYS; SEGREGATION (METALLOGRAPHY); THIN FILM TRANSISTORS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NEODYMIUM ALLOYS;

METALLIC FILMS;

EID: 0030681643     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-471-99     Document Type: Conference Paper

References (7)