Study of scattering by surface acoustic wave motor slider using finite element method simulation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 7 B, 2007, Pages 4915-4920

  Kurosawa, Minora Kuribayashi ^a   Miyazaki, Yoshito ^a   Shigematsu, Takashi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Actuator; Friction drive; Linear actuator; MEMS; Rayleigh wave; Ultrasonic motor

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MEMS; MOTORS; PHASE SHIFT; RAYLEIGH WAVES;

FINITE ELEMENT METHOD SIMULATION; FRICTION DRIVES; LINEAR ACTUATORS; ULTRASONIC MOTORS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 34547892642     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.4915     Document Type: Article

References (18)

1. H. Hashiguchi, Y. Egashira, H. Furukawa, T. Endo, T. Kosaka, K. Kosaka, K. Uozumi, M. Watanabe, T. Yamakawa, N. Miyata, A. Nakada, H. Kubota, and T. Ohmi: Jpn. J. Appl. Phys. 44 (2005) 3307.
2. H.-P. Ko, K.-J. Lee, K.-H. Yoo, C-Y. Kang, S. Kim, and S.-J. Yoon: Jpn. J. Appl. Phys. 45 (2006) 4782.
3. Y. Chen, K. Lu, T. Zhou, T. Liu, and C. Lu: Jpn. J. Appl. Phys. 45 (2006) 4780.
4. C. Lu, T. Zhou, Y. Chen, and K. Lu: Jpn. J. Appl. Phys. 45 (2006) 4770.
5. T. Kanda, A. Makino, Y. Oomori, and K. Suzumori: Jpn. J. Appl. Phys. 45 (2006) 4764.
6. Y. Nakamura, M. K. Kurosawa, T. Shigematsu, and K. Asai: Proc. IEEE Ultrasonics Symp., 2003, p. 1766.
7. T. Shigematsu, M. K. Kurosawa, and K. Asai: Proc. IEEE-NANO, 2003, p. 299.
8. K. Asai and M. K. Kurosawa: Proc. IEEE Ultrasonics Symp., 2001, p. 525.
9. K. Asai: Dr. thesis, Tokyo Institute of Technology, Tokyo (2004) [in Japanese].
10. Y. Miyazaki, T. Shigematsu, and M. K. Kurosawa: Proc. Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th. Anniversary Joint Conf., 2004, p. 1306.
11. P. Wriggers: Computational Contact Mechanics (Wiley, Chichester, 2002) p. 109.
12. J. Kushibiki, I. Takanaga, M. Arakawa, and T. Sannomiya: IEEE Trans. Ultrason. Ferroelectr. Freq. Control 46 (1999) 1315.
13. B. A. Auld: Acoustic Fields and Waves in Solids (R. E. Krieger, Malabar, 1990) Vol. II, 2nd ed. p. 161.
14. Properties of Crystalline Silicon, ed. R. Hull (Inspec, London, 1999).
15. ANSYS™: ANSYS Contact Analysis Seminar (ANSYS, Inc., Tokyo, 2006) [in Japanese].
16. T. Shigematsu and M. K. Kurosawa: in preparation for publication.
17. T. Shigematsu and M. K. Kurosawa: in preparation for publication.
18. T. Shigematsu and M. K. Kurosawa: in preparation for publication.