Sub-nanometer stepping drive of surface acoustic wave motor

Proceedings of the IEEE Conference on Nanotechnology

Volumn 1, Issue , 2003, Pages 299-302

  Shigematsu, T ^a   Kurosawa, M K ^a   Asai, K ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

Acoustic waves; Actuators; Radio frequency; Rails; Silicon; Stators; Steel; Surface acoustic wave devices; Surface acoustic waves; Vibrations

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTICS; ACTUATORS; NANOTECHNOLOGY; RAILS; SILICON; STATORS; STEEL;

ACTUATOR PERFORMANCE; CENTIMETER LEVELS; DRIVING CONDITIONS; MOTION RESOLUTION; PRECISE POSITIONING; RADIO FREQUENCIES; SURFACE ACOUSTIC WAVES; VIBRATIONS;

ACOUSTIC WAVES;

EID: 84943275040     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2003.1231777     Document Type: Conference Paper

References (7)

1. T. Shigematsu et al., "Nanometer Stepping Drives of Surface Acoustic Wave Motor," Tran. UFFC, Vol. 50, pp. 376-385, 2003.
2. T. Shigematsu et al., "Nanometer Stepping Drive of Surface Acoustic Wave Motor," in Proc. IEEE Conf. on Nanotechnology, pp. 495-500, 2001.
3. K. Asai et al., "Evaluation of the driving performance of a asurface acoustic wave linear motor," in Proc. IEEE Ultrason. Symp., pp. 675-679, 2000.
4. N. Osakabe et al., "Surface Acoustic Wave Linear Motor Using Silicon Slider," in Proc. MEMS, pp. 390-395, 1998.
5. M. K. Kurosawa et al., "Optimization of Slider Contact Face Geometry for Surface Acoustic Wave Motor," in Proc. MEMS, pp. 252-255, 2001.
6. T. Shigematsu et al., "Investigation of Surface Acoustic Wave Motor's Motion Resolution Determinant," in Proc. Wold Cong. on Acoustics 2003, unpublished.
7. T. Shigematsu et al., "Stepping Motion Analysis of Surface Acoustic Wave Motor toward Nanometer Resolution Positioning System," in Proc. Ultrason., Symp., pp. 635-638, 2002.