A cylindrical micro-ultrasonic motor using micromachined bulk piezoelectric vibrator with glass case

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 5 B, 2006, Pages 4764-4769

  Kanda, Takefumi ^a   Makino, Akira ^a   Oomori, Yoshitaka ^a   Suzumori, Koichi ^a  

^a OKAYAMA UNIVERSITY   (Japan)

Author keywords

Bulk piezoelectric material; Cylindrical vibrator; Micromotor; Piezoelectric vibrator; PZT; Ultrasonic motor

Indexed keywords

BEARINGS (MACHINE PARTS); GLASS; MICROMACHINING; NATURAL FREQUENCIES; ROTORS; ULTRASONIC MACHINE TOOLS; VIBRATIONS (MECHANICAL);

BULK PIEZOELECTRIC MATERIAL; CYLINDRICAL VIBRATOR; MICROMOTOR; PIEZOELECTRIC VIBRATOR; PZT; ULTRASONIC MOTOR;

PIEZOELECTRIC DEVICES;

EID: 33744477411     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.4764     Document Type: Article

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