Numerical study on scattering of rayleigh wave by silicon slider projections for SAW motor

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2004, Pages 1306-1309

  Miyazaki, Yoshito ^a   Shigematsu, Takashi ^a   Kurosawa, Minoru Kuribayashi ^a   Ishigami, Youhei ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MOTORS; NUMERICAL METHODS; PHASE SHIFT; PROBLEM SOLVING; SILICON;

ENERGY CIRCULATION DRIVE; RAYLEIGH WAVES; SAW MOTORS; SILICON SLIDER PROJECTIONS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 21644486259     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Y. Nakamura, M. K. Kurosawa, T. Shigematsu, and K. Asai, "Effects of Ceramic Thin Film Coating on Friction Surfaces for Surface Acoustic Wave Linear Motor," Proc. of IEEE Ultrasonics Symp, P2M-3, pp. 1766-1769. Honolulu, Oct 5-8, 2003.
2. T. Shigematsu, M. K. Kurosawa and Katsuhiko Asai, "Sub-nanometer Stepping Drive of Surface Acoustic Wave Motor," Proc. IEEE-NANO 2003, WE 3, San Francisco, August 12-14, 2003.
3. K. Asai, M. K. Kurosawa, "Surface acoustic wave motro using an energy circulation driving method," Proc. of IEEE Ultrasonic Symp., P2H-5, pp. 525-529, Atlanta, Oct. 7-10, 2001.
4. 3 Single Crystals," IEEE TRANSACTIONS on UFFC, VOL. 46. No. 5, Sep. 1999, pp.1315-1323